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Electrostatic Chuck Product List and Ranking from 4 Manufacturers, Suppliers and Companies

Electrostatic Chuck Product List

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Customized electrostatic chuck

It is possible to propose suitable electrostatic chucks according to the objects to be held, their applications, and the environment.

Our company develops, manufactures, and sells electrostatic chucks made from various materials to meet our customers' requirements as a comprehensive electrostatic chuck manufacturer. We understand the environment in which our products will be used and the functions required, and we propose optimal product specifications through our development and design technology. Additionally, we provide high-performance and high-functionality products utilizing advanced manufacturing technology. [Examples of Optional Features] ■ Built-in Heater - By integrating stage substrate manufacturing technology with thin heater manufacturing technology, high-precision temperature control is achievable. ■ High-Temperature Compatibility - By using ALN ceramic as the material for the electrostatic chuck, it can be used in high-temperature environments up to 500°C. ■ Abnormal Discharge Countermeasures - With our know-how, we can implement measures against abnormal discharges that tend to occur around gas holes. *For more details, please refer to the PDF document or feel free to contact us.

  • Processing Contract
  • Chuck

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[Demo unit available for loan] Polyimide electrostatic chuck

Contributes to maintaining cleanliness! Used in semiconductor manufacturing equipment and display manufacturing equipment, etc.

The "Polyimide Electrostatic Chuck" generates fewer particles due to wear and contributes to maintaining cleanliness because it has no moving parts. It can grip thin or easily deformable products without applying stress, and when used for transporting wafers or glass, it can operate with power consumption of less than 1W. Additionally, the gripping force is effective not only in the atmosphere but also in a vacuum. It is also adopted in equipment that combines atmospheric and vacuum processes. 【Features】 ■ Clean device ■ Low damage ■ Usable in a vacuum ■ Low power consumption *For more details, please refer to the PDF document or feel free to contact us.

  • Chuck
  • Other conveying machines
  • Transport and handling robots

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[Demo unit available for loan] Multi-material electrostatic chuck

It can be used for transporting materials such as leather and sponge, as well as for folding fabric during product sewing!

The "Multi-Material Electrostatic Chuck" can adsorb and hold various objects, such as textile materials. It can adsorb fabric that cannot be held by vacuum, and it is also capable of adsorbing fabrics like cotton, which are less prone to static electricity. Additionally, because it has full surface adhesion, it is less likely to create wrinkles when adsorbing fabric. 【Features】 ■ Adsorbs and holds various objects, such as textile materials ■ Adsorbs fabric that cannot be held by vacuum ■ Adsorbs fabrics like cotton, which are less prone to static electricity ■ Full surface adhesion reduces the likelihood of wrinkles when adsorbing fabric *For more details, please refer to the PDF document or feel free to contact us.

  • Chuck
  • Other conveying machines
  • Transport and handling robots

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PBN heater & electrostatic chuck

Achieves excellent dimensional stability and temperature reproducibility even at ultra-high temperatures above 1000℃! A composite of PBN and PG using advanced technology.

Momentive's "PBN Heater" and "High-Temperature Electrostatic Chuck (ESC)" are composites that utilize advanced technologies of electrically insulating pyrolytic boron nitride (PBN) and conductive pyrolytic graphite (PG). Their characteristics of high purity and very low outgassing even at high temperatures are derived from chemical vapor deposition at elevated temperatures. High thermal conductivity and anisotropy provide excellent in-plane uniformity. 【Features】 ■ Ultra-high temperature compatibility (1500°C) ■ Dimensional stability and electrical stability ■ Ability to create temperature gradients on the heater surface ■ Capable of rapid heating and cooling *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Other heaters

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Handheld static electricity chuck "Soft Palm"

Ideal for transporting thin wafers, glass substrates, metal foils, films, and more! Eliminates localized stress on the objects caused by conventional vacuum suction methods!

The "Soft Palm" is a handy type of electrostatic chuck that uses Coulomb force to contact and adsorb objects for handling. Its main feature is that it applies localized stress to thin materials due to its surface adsorption. Additionally, there are two types available: a battery-operated (rechargeable) cordless type and a semi-cordless type driven by a dedicated controller. 【Features】 ■ Portable anywhere due to being cordless ■ Can adsorb objects with uneven surfaces ■ The potential is minimized, so there is no dust adsorption on the backside *For more details, please request materials or view the PDF data available for download.

  • Other semiconductor manufacturing equipment

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Low-cost high-performance PI electrostatic chuck

A low-cost, high-performance, multifunctional, customizable electrostatic chuck!

We are reducing costs based on our development capabilities related to electrostatic chucks and selling high-quality electrostatic chucks at reasonable prices. Furthermore, we also offer customization of electrostatic chucks upon customer request. We have experience delivering to factories of major global companies such as Samsung Display, LG Display, and BOE, and we continue to engage in ongoing transactions. Electrostatic chucks are equipment components applicable not only to displays but also to various industrial processes. Please feel free to contact us.

  • Assembly Jig
  • others
  • Assembly Machine

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Electrostatic chuck "Tin Hand" for automatic machines

No wrinkles or damage! An electrostatic adsorption tool capable of adsorbing perforated items like porous materials.

"Tinhand" is an electrostatic adhesion tool designed for automatic machines that softly adsorbs, fixes, and handles films, foils, and paper. It allows for full soft adhesion of large-area thin materials without causing wrinkles or scratches, and it can also adsorb perforated items like porous materials. Additionally, the backside potential of the object is minimized, preventing dust adhesion on the backside. 【Features】 ■ Full soft adhesion of large-area thin materials ■ No wrinkles or scratches ■ Capable of adsorbing perforated items like porous materials ■ Backside potential of the object is minimized, preventing dust adhesion *For more details, please refer to the PDF document or feel free to contact us.

  • others

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